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Autor: herman, Titel: diagnostics processing optical - Optical…

Aus dem Archiv:
9780080538082 - Irving Herman: Optical Diagnostics for Thin Film Processing - Buch

Irving Herman (?):

Optical Diagnostics for Thin Film Processing (1996) (?)

Lieferung erfolgt aus/von: NiederlandeBuch ist in englischer SpracheNeuware, neues BuchEBook, E-Book, elektronisches Buch
ISBN:

9780080538082 (?) bzw. 0080538088

, in Englisch, Academic Press, neu, E-Book
Direct beschikbaar
This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. F... This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing, it is useful as an introduction to the subject or as a resource handbook. It covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing. Examples emphasize applications in microelectronics and optoelectronics. The introductory chapter serves as a guide to all optical diagnostics and their applications. Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic. Productinformatie:Taal: Engels;Vertaald uit het: Engels;Formaat: ePub met kopieerbeveiliging (DRM) van Adobe;Bestandsgrootte: 36.71 MB;Kopieerrechten: Het kopiëren van (delen van) de pagina's is niet toegestaan ;Printrechten: Het printen van de pagina's is niet toegestaan;Voorleesfunctie: De voorleesfunctie is uitgeschakeld;Geschikt voor: Alle e-readers te koop bij bol.com (of compatible met Adobe DRM). Telefoons/tablets met Google Android (1.6 of hoger) voorzien van bol.com boekenbol app. PC en Mac met Adobe reader software;ISBN10: 0080538088;ISBN13: 9780080538082; Engels | Ebook | 1996
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Kategorie: School en studie, Techniek en technologie, Elektronica /, School en studie, Techniek en technologie, Materiaalkunde /, School en studie, Exacte wetenschappen, Optica /, School en studie, Techniek en technologie, Optica
Daten vom 09.06.2016 11:00h
ISBN (andere Schreibweisen): 0-08-053808-8, 978-0-08-053808-2
Aus dem Archiv:
9780080538082 - Irving P. Herman: Optical Diagnostics for Thin Film Processing - Buch

Irving P. Herman (?):

Optical Diagnostics for Thin Film Processing (?)

Lieferung erfolgt aus/von: DeutschlandBuch ist in deutscher SpracheNeuware, neues BuchEBook, E-Book, elektronisches Buch
ISBN:

9780080538082 (?) bzw. 0080538088

, in Deutsch, Pergamon; Pergamon Press, Vereinigte Staaten von Amerika, neu, E-Book
zzgl. Versandkosten, Sofort per Download lieferbar
Optical Diagnostics for Thin Film Processing, This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control.Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field.Key Features* The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing* Useful as an introduction to the subject or as a resource handbook* Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing* Examples emphasize applications in microelectronics and optoelectronics* Introductory chapter serves as a guide to all optical diagnostics and their applications* Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic
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Kategorie: eBooks / Fremdsprachige eBooks / Englische eBooks / Sach- & Fachthemen / Physik
Schlüsselwörter: eBooks
Daten vom 09.06.2016 11:00h
ISBN (andere Schreibweisen): 0-08-053808-8, 978-0-08-053808-2
Aus dem Archiv:
9780123420701 - Herman, Irving P: Optical Diagnostics for Thin Film Processing - Buch

Herman, Irving P (?):

Optical Diagnostics for Thin Film Processing (1995) (?)

Lieferung erfolgt aus/von: Vereinigte Staaten von AmerikaBuch ist in englischer SpracheDieses Buch ist ein gebundenes exemplar (Hardcover), kein TaschenbuchGebrauchtes Exemplar, keine Neues Buch. Abnützungs- und Gebrauchsspuren können sichtbar sein
ISBN:

9780123420701 (?) bzw. 0123420709

, in Englisch, Academic Press, San Diego, CA, gebundenes Buch, gebraucht
zzgl. Versandkosten, Verandgebiet: DOM
Hard cover
Daten vom 04.10.2016 18:54h
ISBN (andere Schreibweisen): 0-12-342070-9, 978-0-12-342070-1
Aus dem Archiv:
9780123420701 - Herman Ph.D. Massachusetts Institute Of: Optical Diagnostics for Thin Film Processing - Buch

Herman Ph.D. Massachusetts Institute Of (?):

Optical Diagnostics for Thin Film Processing (1995) (?)

Lieferung erfolgt aus/von: Vereinigte Staaten von AmerikaBuch ist in englischer SpracheDieses Buch ist ein gebundenes exemplar (Hardcover), kein TaschenbuchGebrauchtes Exemplar, keine Neues Buch. Abnützungs- und Gebrauchsspuren können sichtbar sein
ISBN:

9780123420701 (?) bzw. 0123420709

, in Englisch, Academic Press, gebundenes Buch, gebraucht
zzgl. Versandkosten, Verandgebiet: DOM
Hardcover
Schlüsselwörter: VI-
Daten vom 04.10.2016 18:54h
ISBN (andere Schreibweisen): 0-12-342070-9, 978-0-12-342070-1
Aus dem Archiv:
9780123420701 - Irving P. Herman: Optical Diagnostics for Thin Film Processing - Buch

Irving P. Herman (?):

Optical Diagnostics for Thin Film Processing (1995) (?)

Lieferung erfolgt aus/von: Vereinigte Staaten von AmerikaBuch ist in englischer SpracheDieses Buch ist ein gebundenes exemplar (Hardcover), kein TaschenbuchGebrauchtes Exemplar, keine Neues Buch. Abnützungs- und Gebrauchsspuren können sichtbar sein
ISBN:

9780123420701 (?) bzw. 0123420709

, in Englisch, Academic Press, gebundenes Buch, gebraucht
Versandkosten nach: USA
Academic Press, 1995-10-28. Hardcover. Very Good. Buy with confidence. Excellent Customer Service & Return policy. Ships Fast. Expedite Shipping Available.
Daten vom 04.10.2016 18:54h
ISBN (andere Schreibweisen): 0-12-342070-9, 978-0-12-342070-1
Aus dem Archiv:
9780123420701 - Herman Ph.D.  Massachusetts Institute of Technology, Irving P: Optical Diagnostics for Thin Film Processing - Buch

Herman Ph.D. Massachusetts Institute of Technology, Irving P (?):

Optical Diagnostics for Thin Film Processing (?)

Lieferung erfolgt aus/von: Vereinigte Staaten von AmerikaBuch ist in englischer SpracheGebrauchtes Exemplar, keine Neues Buch. Abnützungs- und Gebrauchsspuren können sichtbar sein
ISBN:

9780123420701 (?) bzw. 0123420709

, in Englisch, Academic Press, gebraucht
Versandkosten nach: USA
Academic Press. Used - Very Good. A bright, square, and overall a nice copy All orders guaranteed and ship within 24 hours. Your purchase supports More Than Words, a nonprofit job training program for youth, empowering youth to take charge of their lives by taking charge of a business.
Daten vom 04.10.2016 18:54h
ISBN (andere Schreibweisen): 0-12-342070-9, 978-0-12-342070-1
Aus dem Archiv:
9780123420701 - Irving Herman: Optical Diagnostics for Thin Film Processing - Buch

Irving Herman (?):

Optical Diagnostics for Thin Film Processing (2007) (?)

Lieferung erfolgt aus/von: NiederlandeBuch ist in englischer SpracheDieses Buch ist ein gebundenes exemplar (Hardcover), kein TaschenbuchNeuware, neues Buch
ISBN:

9780123420701 (?) bzw. 0123420709

, in Englisch, Elsevier Science Publishing Co Inc, gebundenes Buch, neu
12 werkdagen
This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. F... This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control.Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. Key Features* The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing* Useful as an introduction to the subject or as a resource handbook* Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing* Examples emphasize applications in microelectronics and optoelectronics* Introductory chapter serves as a guide to all optical diagnostics and their applications* Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnosticTaal: Engels;Vertaald uit het: Engels;Afmetingen: 43x229x152 mm;Gewicht: 1,22 kg;Verschijningsdatum: februari 2007;ISBN10: 0123420709;ISBN13: 9780123420701; Engelstalig | Hardcover | 2007
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Kategorie: Techniek & Technologie, Elektrotechniek /, Exacte wetenschappen, Natuurkunde /, Techniek & Technologie, Werktuigbouwkunde
Daten vom 04.10.2016 18:54h
ISBN (andere Schreibweisen): 0-12-342070-9, 978-0-12-342070-1