NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009
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NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009: Volume is indexed by Thomson Reuters CPCI-S (WoS).This second book on the subject of MEMS covers contemporary topics of importance to science, engineering and the technology of materials.The emphasis of this book has been placed on Nanoelectromechanical Systems (NEMS) /Microelectromechanical Systems (MEMS) technology and devices. In particular, the associated symposium aimed to cover not only applications that involve MEMS design, but also its modeling, fabrication processes (e.g. semiconductors, polymers, etc.) lab-on-a-chip, and biophotonic medical devices (e.g. DNA, protein and cell-sorting, etc). The focus of these points of interest were the exploration of new devices, and process innovation and engineering application, especially as related to NEMS/MEMS technology and devices.Overall, this makes for a fascinating survey of the subject.Selected papers from a July 2009 symposium report on recent work in technology and devices of nanoelectromechanical systems (NEMS) and microelectromechanical systems (MEMS). Papers describe not only applications that involve MEMS design, but also modeling, fabrication processes, lab-on-a-chip, and biophotonic devices for applications such as protein and cell sorting. Material is in sections on modeling and simulation, photonics, microfluidics, biosensors, NEMS/MEMS for bio-applications, MEMS sensor and energy harvesting, and nano-fabrication. Some specific topics detailed include design and fabrication of novel compliant electrostatically actuated microvalves, enabling low temperature copper bonding with an organic monolayer, a photonic MEMS polarization switch, and photothermal techniques for materials characterization and live cell monitoring. B&w images are included. Englisch, Ebook.