On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems
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| Preise | 2012 | 2013 | 2014 | 2015 |
|---|---|---|---|---|
| Schnitt | Fr. 38.92 (€ 39.80)¹ | Fr. 38.43 (€ 39.30)¹ | Fr. 49.63 (€ 50.75)¹ | Fr. 38.92 (€ 39.80)¹ |
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1
On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems (2012)
DE NWISBN: 9783942710657 bzw. 394271065X, in Deutsch, Tudpress Verlag Der Wissenschaften Gmbh Apr 2012, neu.
Von Händler/Antiquariat, sparbuchladen [52968077], Göttingen, Germany.
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. 190 pp. Englisch.
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. 190 pp. Englisch.
2
On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems (2012)
DE NW RPISBN: 9783942710657 bzw. 394271065X, in Deutsch, Tudpress Verlag Der Wissenschaften Gmbh Apr 2012, neu, Nachdruck.
Von Händler/Antiquariat, AHA-BUCH GmbH [51283250], Einbeck, Germany.
This item is printed on demand - Print on Demand Titel. Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. 190 pp. Englisch.
This item is printed on demand - Print on Demand Titel. Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. 190 pp. Englisch.
3
On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems
DE NWISBN: 9783942710657 bzw. 394271065X, in Deutsch, TUDpress Verlag der Wissenschaften GmbH, neu.
Lieferung aus: Deutschland, Versandkostenfrei.
Buchhandlung Kühn GmbH, [4368407].
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. Buch.
Buchhandlung Kühn GmbH, [4368407].
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. Buch.
4
On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems
DE NWISBN: 9783942710657 bzw. 394271065X, in Deutsch, TUDpress Verlag der Wissenschaften GmbH, neu.
Lieferung aus: Deutschland, Versandkostenfrei.
buchZ AG, [3859792].
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. Buch.
buchZ AG, [3859792].
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. Buch.
5
On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems
DE NWISBN: 9783942710657 bzw. 394271065X, in Deutsch, TUDpress Verlag der Wissenschaften GmbH, neu.
buchversandmimpf2000, [3715720].
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. Buch.
Neuware - This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic waveguides which can be used, e.g., for optical micro-transducers in biosensors. The developed set of basic techniques and the proposed step-and-repeat UV-NIL technique with spin-coated films should contribute to further development in the field of direct polymer patterning by nanoimprinting, to ongoing research at the IHM / IPMS and can be adapted for many other polymeric microsystems. Buch.
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